The Fraunhofer ENAS focuses on research and development in the field of smart systems integration by using micro and nano technologies. The product and service portfolio covers high-precision sensors for industrial applications, sensor and actuator systems with control units and evaluation electronics, printed functionalities like antennas and batteries as well as material and reliability research for microelectronics and microsystem technology. The development, the design and the test of silicon-based and polymer-based MEMS/NEMS, methods and technologies for their encapsulation and integration with electronics as well as metallization and interconnect systems for micro and nano electronics and 3D integration are especially in the focus of the work. Special attention is paid to security and reliability of components and systems. Application areas are semiconductor industry, medical engineering, mechanical engineering, automotive industry, logistics as well as aeronautics.