Email this page Print this page Bookmark this page

Xactix, Inc
Booth # 307 Map It
2403 Sidney St. Ste 300
Pittsburgh, PA  15203
United States
Phone: 412-381-3195
Supplier Information


XACTIX manufactures dry, highly selective isotropic etching systems. A wide range of systems are available for R&D, pilot production and volume production. These dry isotropic etching tools use xenon difluoride gas to selectively etch silicon, molybdenum, germanium and silicon germanium with little or no attack on the majority of materials. The process can also be tuned to etch or not etch Titanium, Tantalum, Tungsten and their nitrides. These systems are particularly well suited for MEMS release, for etching down to very thin oxide layers, or for many other applications where highly selective isotropic silicon, molybdenum and germanium etching is required.

<< Previous | Back to the Search | Next >>

Go back to top