Murata has developed a new MEMS (Micro-Electro-Mechanical Systems) inclinometer, which has best-in-class stability and offset performance over its lifetime and temperature. The new SCL3400 provides two measurement axis and a digital SPI communication interface. The sensor offers user-selectable measurement modes of ±30° with 10 Hz measurement bandwidth and ±90° with 40 Hz measurement bandwidth and excellent offset stability (Typical offset drift over lifetime ≤ 0.12°). The unique New MEMS structures have been developed for this product and the double-differential structure with multiple moving masses compensates for many non-ideal error sources. It is an ideal sensor for the industrial equipment markets. This product is under development and mass production starts in June 2022, samples are already available.
The sensor was developed also to replace our industry-proven one-axis analog high-performance inclinometer (SCA103T) which has provided precise angle information around the globe for various applications. The SCL3400 sensor element and ASIC are packaged into a 12-pin pre-molded plastic housing (measuring 8.6 × 7.6 × 3.3 mm) that guarantees reliable operation over the product's entire lifetime. The SCL3400 sensor consumes only 2mA during operation which makes it also an excellent choice for battery-powered applications. The SCL3400 complements Murata’s sensor portfolio and it is fully pin-compatible with our SCA3300 accelerometer and SCL3300 inclinometer. Replacing or combining sensors with existing PCB design is easy and opens possibilities for different use cases e.g. wider measurement ranges.
Product Features
- High Stability - offering best-in-class offset drift over lifetime and temperature range
- Extensive self-diagnostics
- Proven reliable Murata 3D MEMS design
Applications
The SCL3400 is suitable for various industrial applications requiring high stability, accuracy, and reliable inclination information. Thanks to the minimal offset drift over the lifetime (≤ 0.12°) it is possible to use the sensor in isolated locations and in many cases, it is practically maintenance-free, as it does not need re-calibration to maintain its accuracy performance. The SCL3400 is an excellent choice for Structural Health Monitoring where changes to the material and geometric properties of engineering structures - such as bridges, tunnels, and buildings - are measured and monitored over a long period of time, and often also in harsh outdoor environments. It also is an excellent choice for construction tools and systems, such as rotating lasers, digital bubble levels, and various surveying instruments, where high stability is a must to ensure accurate tilt sensing.
Typical applications include:
- Leveling
- Tilt sensing
- Structural Health Monitoring
- Inertial measurement units (IMUs)
- Positioning and guidance systems
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