Visit Nikon Precision at the Sensor Expo Exhibit
Nikon leverages 100 years of opto-electronic and precision technology experience to deliver high productivity, cost-effective MEMS Steppers to satisfy the unique requirements of many diverse markets. These lithography systems are available with low numerical apertures to maximize depth of focus, and support a variety of field sizes. They also are compatible with a range of substrates and materials, as well as thick films, and extremely warped surfaces. The majority of MEMS Steppers also support critical backside alignment capabilities.
Well over 170 MEMS Steppers are in customer use around the world today, and Nikon continues to focus on expanding the product portfolio for these specialty markets.
Newly developed MEMS Steppers enhance imaging with ghi/i-line capabilities and provide up to 44 x 44 mm field sizes with 50 x 50 mm field size under development. The Nikon MEMs Stepper supports substrates up to 300 mm diameter as well as 200 mm x 250 mm rectangle panel sizes or equivalent.