Evatec AG  

Clearwater,  FL 
United States
  • Booth: 1131

Welcome to the thin film powerhouse

Evatec's evaporation, sputter, and PECVD technologies support the deposition of metals , dielectrics, piezo electrics and magnetic matreiuals required for a whole range of MEMS applications.  Click here to learn more about the typical applications we support- from MEMS sensors, to magnetic, optical and piezo MEMS.

MEMS production is supported on a number of different tools according to application and throughput requirements. From 0.5 to 2.0 meters, the BAK family with their flexible source and substrate handling combined with Evtaec's 70 years of know how are the benchmark evaporators for MEMS applications .  The LLS EVO II vertical batch sputter tool is ideal for smaller production volumes for any functional layer at lower investment costs, while  the CLUSTERLINE® family of 200mm and 300mm tools offering multiple deposition and etch processes technologies on a single platform are ideal for volume production in some of the most demanding applications including  RF MEMS  and soft magnetics in IVRS. 

Our local North America sales team is ready to help you identify the best production solution for you.  Click here to contact them now. 

Brands: CLUSTERLINE® - Family of cluster tools for 200,300 or 600mm processing , BAK Evaporator Family, LLS EVO II Batch Sputter, SOLARIS® Inline Sputter tools,

 Press Releases

  • LAYERS is Evatec's thin film tehcnology magazine. Its full of business and technology new stories including from guest authors acros all Evatec core markets of Advanced Packaging, Semicinducotor, Oprtoelectroncs and Photonics.  Click here to download a pdf of the semicondiuctor chapter including news stories across Power Devices, MEMS and Wireless.

    Want to read more?   To request your copy of the full magazine in printed or soft copy format visit the Evatec booth or use the contact form to contact our local Evatec NA office.  Dont forget to include your delivery address if you want a printed copy 

    Happy Reading !


  • CLUSTERLINE® Thin Film Production Platforms
    CLUSTERLINE® are a family of 200, 300 and 600mm tools for single substrate processing. All share cluster architecture with cassette-to-cassette processing and fully automated handling. Technologies available include etch, evaporation, sputter and PECVD....

  • The new generation CLUSTERLINE® is now available from Evatec.  More process capabilities, more configuration options and more productivity . To learn about the tool why not watch the new product video on the Evatec youtube channel .  You can also find out more about the tools by vsiting the CLUSTERLINE® pages on the Evatec web site 
  • LAYERS 6
    It might not be a product.. but its the next best thing! LAYERS 6 is your thin film technology guide full of market and technology news about how Evatec and guest authors from around the world are solving thin film manufacturing challenges...

  • Download the semiconductor chapter now to read 10 articles covering Power Devices, MEMS and Wireless including:

    - 300mm backside metallization processes with improved control and productivity 

    - Powering Ahead Together- Driving up energy efficiency in Bipolar Devices ( Together with Lam Research)

    - Silterra:  Delivering high performance MEMS solutions to acjieve faster time to market ( Written by Silterra) 

    - The Doctor is inside yoir body - new thin film battery technology ( Written by Ilika) 

    - AlScN Technology- where are we today ?

    - Optical Waveguiide Materials for  HAMR -Heat Assisted Magmetic Recording ( Written by Seagate)

    - Thin Film SAW- Ready to innovate for future wireless systems 

    To request the full magazine  as eitehr soft or hard copy including chapters on Adbacned Packaging, Optoelectronbics and Photonics simply contact staff at the Evatec booth or complete the contact form 

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