microfab is your MEMS Manufactory partner for producing microsystems components – both in the form of prototypes and engineering samples as well as in small and after transfer to a contract manufacturer in large volumes.
microfab is an independent Service Provider in the field of silicon-based micro-systems technology and a global supplier of customised microsystems. Our production lines, located in two Class ISO 4/5 cleanrooms, features state-of-the-art facilities that permit wafers of 100 to 150 mm to be processed.
OUR EXPERTISE FOR YOUR PRODUCTS
Our ability to ensure quick, reliable, flexible and uncomplicated implementations of new ideas rests on our broad range of production technologies, state-of-the-art facilities and detailed process knowledge.
We provide unmatched foundation of knowledge and experience, seamless integration from design to fabrication, and Technologies unique in the MEMS world.
LPCVD - PECVD - RIE - DRIE - LiTHOGRAPHY - BONDING - OXIDATION - WET&DRY ETCHING - SPUTTERING - TEOS - DOPING - THIN FILMS - BACKEND - DIFFUSION