Sumitomo (SHI) Cryogenics of America, Inc.
Thanks for your interest in Marathon® CP Series Cryopumps!
SHI Cryogenics Group, an integral part of the Precision Equipment Division of Sumitomo Heavy Industries, Ltd., is a leading worldwide provider of innovative cryogenic and vacuum solutions. Sumitomo (SHI) Cryogenics of America, Inc. (“SCAI”) is the North American Division of the SHI Cryogenics Group, focusing on design, manufacturing, sales and service, with corporate office in Allentown, PA, and additional locations in Illinois, California, New York and Texas.
Marathon® CP Series Cryopumps are specifically designed to meet the needs of high vacuum processes. Applications for these versatile systems range from custom laboratory equipment to industrial-scale tools. Manufacturers of semiconductor devices, flat panel displays, test equipment, solar manufacturing and a wide variety of coating and thermal vacuum systems require efficient, reliable and robust systems that offer a low cost of ownership. Marathon CP Series Cryopumps deliver on all fronts.
A range of standard and low profile enclosures, ANSI, ISO and CF flanges, as well as manual and fully automatic features, ensure that users have modularity and flexibility to choose from when designing their systems.
All Marathon CP Series Cryopumps are driven by highly-efficient and reliable helium compressors. These compressors boast an industry leading 30,000 hour maintenance interval. Compressors are available in single-phase and three-phase, low and high voltage versions.
For those users requiring the latest in efficient, fully-automated operation, SHI Cryogenics Group offers our Marathon Cryopump Controller (MCC). The MCC enables fully automatic operation of the cryopump using commands from a host computer and industry standard cryopump protocol. If you do not utilize a host computer, optional software is available to interface the MCC to a standard Windows-based computer. The result of utilizing the Marathon CP Cryopump with MCC is greatly reduced downtime between production cycles, improved process times and better overall efficiency of the user’s process.
All SHI products are supported by a worldwide sales and support network. They can be readily maintained without breaking vacuum or removing the cryopump from the chamber for return or replacement. As a result, serviceability maximizes production uptime and lowers the total cost of ownership.