Materials Science, Inc.

San Diego,  CA 
United States
http://www.msi-pse.com
  • Booth: 312

Sputtering Sources, Power Supplies, Reactive Gas Controllers

Materials Science, Inc. was established in 1989 to supply SunSourceä planar magnetron sputtering sources – a new generation of the highest performance, most productive, most reliable, most easily maintained & serviced sources.  Today, our products also include the Ion™ Series DC power supplies with advanced arc suppression for reactive sputtering & substrate bias, RF power generation systems & components like RF blocking filters & power supply switches.

SunSourceä GEN II sputtering sources include practical features designed to enhance reliability & productivity in industrial environments.  Materials Science was the first to introduce injection of sputtering gas through the cathode body (thereby eliminating gas manifolds & various process issues) & to implement efficient water flow allowing high power levels without magnet or target overheating.  We were pioneers in the development of a wide uniform target erosion area resulting in stable reactive sputtering processes, long useful target life (high target utilization), virtually no material re-deposition & higher rates & power densities.  Conversely, these same sources are stable & uniquely provide high target utilization at very low power levels.  The company introduced the Kamlokä fast target exchange system allowing target exchanges in minutes regardless of length - eliminating galling & seizure of fasteners that are no longer required.

Complete 2” & 3” diameter target Polaris™ DC & RF research sputtering packages that include power generation systems plus adjustable position, tilt, shutters with a unique flexible feedthrough shaft & other options are available.  They are incredibly stable at very low power levels & absolutely repeatable, run to run.


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