Meivac Inc

San Jose,  CA 
United States
  • Booth: 915

MeiVac quality and customer satisfaction for over 40 years.

  • Over 40 years of vacuum system and component design, manufacture, and support.   Manufacturer of eVap electron beam sources, MAK magnetron sputter sources, HTR high-temperature substrate heaters, and Vari-Q throttle valves. 

eVap Electron Beam Sources

  • Complete line of single & multiple pocket configurations 
  • 2cc to 400cc pocket volume
  • Complete flange mount assemblies with feedthroughs and shutter
  • Progammable XY sweep controllers
  • 3kW to 15kW power supply options
  • Deposition controllers 
  • Crucible liners and accessories

MAK Planar Magnetron Sputter Sources

  • 1.3”, 2”, 3”, 4”, 6”
  • DC/RF compatible
  • Insitu adjustable angle of incident or source to substrate distance
  • Right angle, linear and flex mount
  • Custom Multi-source packages
  • Optional shutter, gas injection, flange, and UHV selection
  • DC & RF power supplies/matching networks

HTR Substrate Heaters

  • Wafer or sample holders
  • 2”,3”,4”, and 6” diameter
  • 950 C °

VQ Throttle Valves

  • Vari-Q multi-vane, high resolution Throttle Valves
  • Upstream or Downstream pressure control, compatible with most pressure control systems.
  • Elastomer or metal sealed flanges, from 100mm to 38”, ANSI, ISO, JIS, CF
  • Optimized open gas throughput, linear high resolution pressure control.


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