Osaka Vacuum USA, Inc.

Fremont,  CA 
United States
  • Booth: 423

Osaka Vacuum's rugged pumps are diamonds in the rough!

 Osaka Vacuum is simply dependable and reliable 


Osaka Vacuum is your reliable one-stop application-specific Turbomolecular Pump global partner, specializing in process applications & solutions for Solar Cells manufacturing, Storage/Semiconductor processes, Microscopy/Metrology, general vacuum to a variety of vacuum instrumentation.


Osaka Turbopumps/Dry Pumps offering:

(Corrosive & Standard Series)

1) TGkine Series MagLev Turbopumps featuring all on-board integrated controller for most processes

<1650-2200-3300-4200 L/S> 

2) Small Compact/Low Cost Dry pumps - 3.75 mtorr Base! Fast Loadlock pumping and ideal for backing turbopumps

<8 - 18 CFM> 

3) Light Duty Dry pumps - FR060D & ER100D series offering fast pumpdown from Atmosphere to base offering reduced footprint and Energy/Utility Saving for standard to Light Duty processes

<36 - 59 CFM> 

4) TG-M Series - Digital MagLev Wide Range Compound Turbopumps, high speed/throughput, free orientation


5) TG-F Series - Affordable wide range Turbopumps/suitable for all PVDs

<220-350-450-800-1100-2400 L/S>

6) TG/TS Series - High throughout, rugged industrial version

<200-440-550-1000-1300-1800-3400-5500 L/S>

7) Instrumentation Series - 60 L/S, 70 L/S & 240 L/S high performance Turbopumps

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