Osaka Vacuum's rugged pumps are diamonds in the rough!
Osaka Vacuum is simply dependable and reliable
Osaka Vacuum is your reliable one-stop application-specific Turbomolecular Pump global partner, specializing in process applications & solutions for Solar Cells manufacturing, Storage/Semiconductor processes, Microscopy/Metrology, general vacuum to a variety of vacuum instrumentation.
Osaka Turbopumps/Dry Pumps offering:
(Corrosive & Standard Series)
1) TGkine Series MagLev Turbopumps featuring all on-board integrated controller for most processes
2) Small Compact/Low Cost Dry pumps - 3.75 mtorr Base! Fast Loadlock pumping and ideal for backing turbopumps
<8 - 18 CFM>
3) Light Duty Dry pumps - FR060D & ER100D series offering fast pumpdown from Atmosphere to base offering reduced footprint and Energy/Utility Saving for standard to Light Duty processes
<36 - 59 CFM>
4) TG-M Series - Digital MagLev Wide Range Compound Turbopumps, high speed/throughput, free orientation
5) TG-F Series - Affordable wide range Turbopumps/suitable for all PVDs
6) TG/TS Series - High throughout, rugged industrial version
7) Instrumentation Series - 60 L/S, 70 L/S & 240 L/S high performance Turbopumps